发明申请
- 专利标题： Detachable electrostatic chuck having sealing assembly
- 专利标题（中）： 具有密封组件的可拆卸静电卡盘
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申请号： US11549594申请日： 2006-10-13
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公开(公告)号： US20080089001A1公开(公告)日： 2008-04-17
- 发明人: Vijay D. Parkhe , Cheng-Tsiung Tsai , Steven V. Sansoni
- 申请人： Vijay D. Parkhe , Cheng-Tsiung Tsai , Steven V. Sansoni
- 专利权人： Applied Materials, Inc.
- 当前专利权人： Applied Materials, Inc.
- 主分类号： H01L21/683
- IPC分类号： H01L21/683 ; H01R43/00 ; H02N13/00
摘要：
A detachable electrostatic chuck is capable of being attached to a pedestal in a process chamber. The chuck comprises an electrostatic puck having a ceramic body with an embedded electrode. The chuck also has a baseplate below the electrostatic puck with a lower surface which is bonded to a sealing assembly comprising a sealing plate and sealing ring. The sealing plate and ring are polished to form a gas-tight seal between the chuck and pedestal to prevent gas leakage from or into this region.
公开/授权文献
- US07589950B2 Detachable electrostatic chuck having sealing assembly 公开/授权日：2009-09-15