发明申请
- 专利标题： Thin film device having thin film elements and thin film pattern on thin film elements, and method of fabricating the same
- 专利标题（中）： 在薄膜元件上具有薄膜元件和薄膜图案的薄膜器件及其制造方法
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申请号： US11820824申请日： 2007-06-21
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公开(公告)号： US20080090054A1公开(公告)日： 2008-04-17
- 发明人: Yasuo Koshizuka
- 申请人： Yasuo Koshizuka
- 申请人地址： JP Tokyo
- 专利权人： Casio Computer Co., Ltd.
- 当前专利权人： Casio Computer Co., Ltd.
- 当前专利权人地址： JP Tokyo
- 优先权： JP2006-180760 20060630
- 主分类号： G03F7/00
- IPC分类号： G03F7/00 ; B32B3/00
摘要：
A thin film device has a substrate having thin film elements, and an undercoat formed on the thin film elements of the substrate. The undercoat comprises at least one insulating film formed into a predetermined shape by closely adhering, exposing, and etching a film comprising a photosensitive resin material. The thin film device further has a thin film pattern formed into a predetermined shape on the undercoat.
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