发明申请
- 专利标题: Method for performing pattern pitch-split decomposition utilizing anchoring features
- 专利标题(中): 使用锚固特征进行图案间距分解分解的方法
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申请号: US11898647申请日: 2007-09-13
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公开(公告)号: US20080092106A1公开(公告)日: 2008-04-17
- 发明人: Duan-Fu Hsu , Noel Corcoran , Jang Chen , Douglas Van Den Broeke
- 申请人: Duan-Fu Hsu , Noel Corcoran , Jang Chen , Douglas Van Den Broeke
- 主分类号: G06F17/50
- IPC分类号: G06F17/50
摘要:
A method for decomposing a target pattern containing features to be printed on a wafer into multiple patterns. The method includes the steps of: (a) determining a minimum critical dimension and pitch associated with a process to be utilized to image the multiple patterns; (b) generating an anchoring feature; (c) disposing the anchoring feature adjacent a first feature of the target pattern; (d) growing the anchoring feature a predetermined amount so as to define a first area; (e) assigning any feature within the first area to a first pattern; (f) disposing the anchoring feature adjacent a second feature of the target pattern; (g) growing the anchoring feature the predetermined amount so as to define a second area; and (h) assigning any feature within the second area to a second pattern. Steps (c)-(h) are then repeated until the densely spaced features within the target pattern have been assigned to either the first or second pattern.
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