Invention Application
- Patent Title: Solid Source Container With Inlet Plenum
- Patent Title (中): 固体来源容器与入口大会
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Application No.: US11867171Application Date: 2007-10-04
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Publication No.: US20080092816A1Publication Date: 2008-04-24
- Inventor: Charles Michael Birtcher , Thomas Andrew Steidl
- Applicant: Charles Michael Birtcher , Thomas Andrew Steidl
- Applicant Address: US PA Allentown
- Assignee: AIR PRODUCTS AND CHEMICALS, INC.
- Current Assignee: AIR PRODUCTS AND CHEMICALS, INC.
- Current Assignee Address: US PA Allentown
- Main IPC: B05C11/10
- IPC: B05C11/10 ; B05B17/04 ; B05B7/26

Abstract:
A vessel for conveying a precursor fluid from the vessel, comprising: an interior volume having an upper volume and a lower volume, wherein the two volumes are in communication and the lower volume contains precursor; a lid comprising a fluid inlet directing carrier gas into the vessel, a “T” fluid outlet, a sidewall having an upper lip wherein the upper lip contacts the lid; a separator interposed between the lid and the sidewall wherein the separator resides adjacent the upper lip and segments the interior volume into the upper volume and a lower volume; and an inlet plenum in communication with the fluid inlet having a plenum chamber opening towards the separator to direct the carrier gas through the separator and towards the precursor. A method for using the apparatus is also disclosed.
Public/Granted literature
- US09109287B2 Solid source container with inlet plenum Public/Granted day:2015-08-18
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