发明申请
- 专利标题: Storage nodes, phase change memory devices, and methods of manufacturing the same
- 专利标题(中): 存储节点,相变存储器件及其制造方法
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申请号: US11907844申请日: 2007-10-18
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公开(公告)号: US20080093591A1公开(公告)日: 2008-04-24
- 发明人: Yoon-ho Khang , Ki-Joon Kim , Dong-seok Suh
- 申请人: Yoon-ho Khang , Ki-Joon Kim , Dong-seok Suh
- 专利权人: SAMSUNG ELECTRONICS CO., LTD
- 当前专利权人: SAMSUNG ELECTRONICS CO., LTD
- 优先权: KR10-2006-0101570 20061018
- 主分类号: H01L47/00
- IPC分类号: H01L47/00 ; H01L21/06
摘要:
A storage node may include a bottom electrode contact layer, a phase change layer connected to the bottom electrode contact layer, and a top electrode layer connected to the phase change layer. The bottom electrode contact layer may protrude toward the phase change layer. A phase change memory device may include a switching device and the storage node. The switching device may be connected to the bottom electrode contact layer. A method of manufacturing the storage node may include forming a via hole in an insulating interlayer, at least partially filling the via hole to form a bottom electrode contact layer, protruding the bottom electrode contact layer from the via hole, and forming a phase change layer that covers the bottom electrode contact layer. A method of manufacturing a phase change memory device may include forming the switching device on a substrate and manufacturing the storage node.
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