Invention Application
- Patent Title: Non-volatile memory device and methods of manufacturing and operating the same
- Patent Title (中): 非易失性存储器件及其制造和操作方法
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Application No.: US11698067Application Date: 2007-01-26
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Publication No.: US20080093649A1Publication Date: 2008-04-24
- Inventor: Jin-Woo Kim , Jong-Hyon Ahn , Don-Woo Lee
- Applicant: Jin-Woo Kim , Jong-Hyon Ahn , Don-Woo Lee
- Assignee: Samsung Electronics Co. Ltd.
- Current Assignee: Samsung Electronics Co. Ltd.
- Priority: KR10-2006-0103065 20061023
- Main IPC: H01L29/788
- IPC: H01L29/788

Abstract:
A non-volatile memory device and methods of manufacturing and operating the same are provided. In a method of manufacturing a non-volatile memory device, a substrate having a stepped portion that may include a first horizontal face, a second horizontal face lower than the first horizontal face, and a vertical face connected between the first and second horizontal faces may be prepared. A first impurity region may be formed under the first horizontal face. A tunnel insulation layer may be continuously formed on the vertical face and the second horizontal face. A floating gate electrode having a tip higher than the first horizontal face may be formed on the tunnel insulation layer. A dielectric layer may be formed on the floating gate electrode. The floating gate electrode may be covered with a control gate electrode. A second impurity region horizontally spaced apart from the floating gate electrode may be formed under the second horizontal face.
Public/Granted literature
- US07544991B2 Non-volatile memory device and methods of manufacturing and operating the same Public/Granted day:2009-06-09
Information query
IPC分类: