Invention Application
- Patent Title: MEM switching device and method for making same
- Patent Title (中): MEM开关器件及其制造方法
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Application No.: US12001567Application Date: 2007-12-12
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Publication No.: US20080093691A1Publication Date: 2008-04-24
- Inventor: Heinz Busta
- Applicant: Heinz Busta
- Assignee: Cabot Microelectronics Corporation
- Current Assignee: Cabot Microelectronics Corporation
- Main IPC: H01L29/84
- IPC: H01L29/84 ; H01L21/50

Abstract:
A MEM device and method for fabricating a MEM device. A MEM device comprising a lever mechanism residing along a substrate is disclosed. A contact material is deposited on a first surface of the lever mechanism. In one arrangement, the first surface is disposed towards the substrate. A first contact region may be deposited on the substrate. The first contact region attracts the lever mechanism towards the substrate such that the contact material becomes operationally coupled to a second contact region. The MEM device may also comprise a first anchor portion and a second anchor portion. The first and second anchor portions may be integral to a top surface of the substrate. Aspects of the invention are also particularly useful in providing an encapsulated MEM switching device.
Information query
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