Invention Application
- Patent Title: SEMICONDUCTOR WAFER HAVING EMBEDDED ELECTROPLATING CURRENT PATHS TO PROVIDE UNIFORM PLATING OVER WAFER SURFACE
- Patent Title (中): 具有嵌入式电镀电流的半导体晶体管提供均匀的超薄膜表面
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Application No.: US11551864Application Date: 2006-10-23
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Publication No.: US20080093746A1Publication Date: 2008-04-24
- Inventor: Kyoung Woo Lee , Ja Hum Ku , Ki Chul Park , Seung Man Choi
- Applicant: Kyoung Woo Lee , Ja Hum Ku , Ki Chul Park , Seung Man Choi
- Main IPC: H01L23/52
- IPC: H01L23/52 ; H01L21/4763

Abstract:
A semiconductor wafer having multi-layer metallization structures that are fabricated to include embedded interconnection structures which serve as low-resistance electroplating current paths to conduct bulk electroplating current fed to portions of a metallic seed layer at peripheral surface regions of the wafer to portions of the metallic seed layer at inner/central surface regions of the semiconductor wafer to achieve uniformity in metal plating in chip regions across the wafer.
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