发明申请
- 专利标题: FILM FORMING SYSTEM AND METHOD FOR FORMING FILM
- 专利标题(中): 电影制作系统及其制作方法
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申请号: US11771908申请日: 2007-06-29
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公开(公告)号: US20080095936A1公开(公告)日: 2008-04-24
- 发明人: Jiro Senda , Motohiro Oshima , Tetsuo Shimizu , Koji Tominaga , Koichiro Matsuda , Yutaka Yamagishi
- 申请人: Jiro Senda , Motohiro Oshima , Tetsuo Shimizu , Koji Tominaga , Koichiro Matsuda , Yutaka Yamagishi
- 优先权: JPP2006-181363 20060630
- 主分类号: C23C16/455
- IPC分类号: C23C16/455 ; C23C16/52
摘要:
An obstruct of this invention is to downsize a chamber, consequently a film forming system, to improve a film thickness distribution and to improve throughput of film forming by increasing the amount of the vaporized liquid precursor. The film forming system 1 is to form a film by vaporizing a liquid precursor and then depositing the vaporized liquid precursor on a substrate W, and comprises a chamber 2 inside of which the substrate W is held and multiple injection valves 3 that are arranged at different positions in the chamber 2 and that directly inject the identical liquid precursor in the chamber 2, vaporize the identical liquid precursor by flash boiling and then supply the vaporized liquid precursor.
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