发明申请
- 专利标题: PROJECTION EXPOSURE APPARATUS, PROJECTION EXPOSURE METHOD AND PROJECTION OBJECTIVE
- 专利标题(中): 投影曝光装置,投影曝光方法和投影目标
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申请号: US11747630申请日: 2007-05-11
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公开(公告)号: US20080117400A1公开(公告)日: 2008-05-22
- 发明人: Hans-Juergen Rostalski , Heiko Feldmann , Wilhelm Ulrich
- 申请人: Hans-Juergen Rostalski , Heiko Feldmann , Wilhelm Ulrich
- 申请人地址: DE Oberkochen
- 专利权人: CARL ZEISS SMT AG
- 当前专利权人: CARL ZEISS SMT AG
- 当前专利权人地址: DE Oberkochen
- 优先权: DE102006022958.4 20060511
- 主分类号: G03B27/54
- IPC分类号: G03B27/54 ; G02B17/08
摘要:
A projection exposure apparatus for the exposure of a radiation-sensitive substrate arranged in the region of an image surface of a projection objective with at least one image of a pattern of a mask that is arranged in the region of an object surface of the projection objective has a light source for emitting ultraviolet light from a wavelength band having a bandwidth Δλ>10 pm around a central operating wavelength λ>200 nm; an illumination system for receiving the light from the light source and for directing illumination radiation onto the pattern of the mask; and a projection objective for the imaging of the structure of the mask onto a light-sensitive substrate. The projection objective is a catadioptric projection objective having at least one concave mirror arranged in a region of a pupil surface of the projection objective, and a negative group having at least one negative lens arranged in direct proximity to the concave mirror in a region near the pupil surface, where a marginal ray height (MRH) of the imaging is greater than a chief ray height (CRH).
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