发明申请
- 专利标题: Corradiator employing a wedge-shaped cross-section
- 专利标题(中): Corradiator采用楔形横截面
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申请号: US11783289申请日: 2007-04-06
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公开(公告)号: US20080130125A1公开(公告)日: 2008-06-05
- 发明人: Michael Goelles , Ralf Netz , Marcus Heidkamp , Joerg-Michael Funk
- 申请人: Michael Goelles , Ralf Netz , Marcus Heidkamp , Joerg-Michael Funk
- 优先权: DE102006034910.5 20060728
- 主分类号: G02B27/10
- IPC分类号: G02B27/10
摘要:
A beam corradiator for combining two radiation beams, preferably movable beams independent from each other in at least one direction, to scan and/or influence a sample, preferably a manipulation system and an imaging system, with a partially reflecting layer being provided for the corradiation, wherein the thickness of the layer is provided with a preferably consistent incline or decline over the optically effective cross-section of the beam corradiatior.
公开/授权文献
- US07656583B2 Beam combiner employing a wedge-shaped cross-section 公开/授权日:2010-02-02
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