发明申请
- 专利标题: DEPOSITING ORGANIC MATERIAL ONTO AN OLED SUBSTRATE
- 专利标题(中): 将有机材料沉积在OLED基板上
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申请号: US11564976申请日: 2006-11-30
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公开(公告)号: US20080131587A1公开(公告)日: 2008-06-05
- 发明人: Michael L. Boroson , Michael Long , Jeremy M. Grace , Neil P. Redden , Dustin L. Winters , Thomas W. Palone
- 申请人: Michael L. Boroson , Michael Long , Jeremy M. Grace , Neil P. Redden , Dustin L. Winters , Thomas W. Palone
- 主分类号: B05D5/06
- IPC分类号: B05D5/06 ; B05D1/32
摘要:
A method of depositing organic material onto an OLED substrate, comprising: providing a manifold for receiving vaporized organic material, the manifold including an aperture plate having openings, the aperture plate openings being selected to provide beams of vaporized organic material directed to the substrate, such beams having off-axis components; and providing a mask spaced between the OLED substrate and the manifold, the mask having openings that respectively correspond to the aperture plate openings, the mask openings being selected to skim off at least a portion of the off-axis components of the beams.