Liquid ejection chips 101, each having a ejection port 103, a supply port 104 communicating with the ejection port 103 by way of a flow channel 108 and a heater arranged in the flow channel 108, are bonded to a single chip plate 102 to form a two-dimensional array. As a result, a liquid ejection unit having a plurality of ejection ports 103 and a plurality of supply ports 104 is formed. As the heaters are driven while probe solutions are supplied to the respective supply ports 104, the probe solutions are ejected from the ejection ports 103 to the outside under the pressure of bubbles. The probe solutions of mutually different types are ejected respectively from the ejection ports 103 and made to adhere to a solid-phase substrate. Thus, a desired probe array can be manufactured.