发明申请
- 专利标题: LATERAL INSULATED GATE BIPOLAR TRANSISTOR HAVING A RETROGRADE DOPING PROFILE IN BASE REGION AND METHOD OF MANUFACTURE THEREOF
- 专利标题(中): 具有基底区域中的重新加工型材的侧向绝缘栅双极晶体管及其制造方法
-
申请号: US11943614申请日: 2007-11-21
-
公开(公告)号: US20080135972A1公开(公告)日: 2008-06-12
- 发明人: Teruhisa Ikuta , Yoshinobu Sato
- 申请人: Teruhisa Ikuta , Yoshinobu Sato
- 申请人地址: JP Kadoma-shi
- 专利权人: Matsushita Electric Industrial Co., Ltd.
- 当前专利权人: Matsushita Electric Industrial Co., Ltd.
- 当前专利权人地址: JP Kadoma-shi
- 优先权: JP2006-332718 20061211
- 主分类号: H01L29/739
- IPC分类号: H01L29/739 ; H01L21/331
摘要:
In a semiconductor device of the present invention, a first base region 16 is extended to a part under a gate electrode 7 while having a vertical concentration profile of an impurity that increases from the surface of a semiconductor layer 3 and becomes maximum under an emitter region 5, and the length in the lateral direction from a point where the impurity concentration becomes maximum located under an end of the gate electrode 7 to the boundary with a second base region is is not smaller than the length in the vertical direction from the point where the impurity concentration becomes maximum to the boundary with the second base region 15.
公开/授权文献
信息查询
IPC分类: