发明申请
US20080139688A1 Thiol Compound And Photosensitive Composition Using The Same 失效
硫醇化合物和使用它的光敏组合物

Thiol Compound And Photosensitive Composition Using The Same
摘要:
The present invention relates to a thiol compound represented by formula (1): wherein R1, R2 and n have the same meanings as in the specification, method for producing the compound, and to a photosensitive composition and a black matrix resist composition using the same which have high sensitivity and excellent property of retaining a line width in fine line patterns at the time of alkaline development, that is, being excellent in development latitude.
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