发明申请
US20080142852A1 SEMICONDUCTOR DEVICE STRUCTURE WITH ACTIVE REGIONS HAVING DIFFERENT SURFACE DIRECTIONS
审中-公开
具有不同表面方向的主动区域的半导体器件结构
- 专利标题: SEMICONDUCTOR DEVICE STRUCTURE WITH ACTIVE REGIONS HAVING DIFFERENT SURFACE DIRECTIONS
- 专利标题(中): 具有不同表面方向的主动区域的半导体器件结构
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申请号: US12032913申请日: 2008-02-18
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公开(公告)号: US20080142852A1公开(公告)日: 2008-06-19
- 发明人: Bruce B. Doris , Oleg Gluschenkov , MeiKei Ieong , Effendi Leobandung , Huilong Zhu
- 申请人: Bruce B. Doris , Oleg Gluschenkov , MeiKei Ieong , Effendi Leobandung , Huilong Zhu
- 申请人地址: US NY Armonk
- 专利权人: International Business Machines Corporation
- 当前专利权人: International Business Machines Corporation
- 当前专利权人地址: US NY Armonk
- 主分类号: H01L27/092
- IPC分类号: H01L27/092
摘要:
Semiconductor structure and method to simultaneously achieve optimal stress type and current flow for both nFET and pFET devices, and for gates orientated in one direction, are disclosed. One embodiment of the method includes bonding a first wafer having a first surface direction and a first surface orientation atop a second wafer having a different second surface orientation and a different second surface direction; forming an opening through the first wafer to the second wafer; and forming a region in the opening coplanar with a surface of the first wafer, wherein the region has the second surface orientation and the second surface direction. The semiconductor device structure includes at least two active regions having different surface directions, each active region including one of a plurality of nFETs and a plurality of pFETs, and wherein a gate electrode orientation is such that the nFETs and the pFETs are substantially parallel to each other.
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