发明申请
US20080143984A1 PROJECTION METHOD INCLUDING PUPILLARY FILTERING AND A PROJECTION LENS THEREFOR 有权
投影方法,包括滤波器和投影镜头

PROJECTION METHOD INCLUDING PUPILLARY FILTERING AND A PROJECTION LENS THEREFOR
摘要:
A catadioptric lens with optical elements, which are arranged along an optical axis and with at least one concave mirror located in the vicinity of a pupillar surface of the projection lens. The concave mirror is sub-divided into a number of annular or honeycomb mirror segments, which can be displaced independently in relation to one another with the aid of piezoelectric drive elements. The mirror can be used as a phase-shifting pupillar filter, whereby the filtration function can be adjusted by the relative displacement of the mirror elements in relation to one another.
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