发明申请
US20080147225A1 System for implementing intelligent and accurate updates to state-based advanced process control (APC) models
有权
用于实现基于状态的先进过程控制(APC)模型的智能和准确更新的系统
- 专利标题: System for implementing intelligent and accurate updates to state-based advanced process control (APC) models
- 专利标题(中): 用于实现基于状态的先进过程控制(APC)模型的智能和准确更新的系统
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申请号: US11642502申请日: 2006-12-19
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公开(公告)号: US20080147225A1公开(公告)日: 2008-06-19
- 发明人: Nital S. Patel
- 申请人: Nital S. Patel
- 主分类号: G06F17/00
- IPC分类号: G06F17/00
摘要:
In one embodiment, an apparatus and method for implementing intelligent and accurate updates to state-based advanced process control (APC) models are disclosed. In one embodiment, the method comprises receiving at least one of a re-measurement or a data invalidation at a state-based advanced process control (APC) model, referencing a state value table and a state update table to determine the current state of lot measurements in the state-based APC model, updating the state value table and the state update table to reflect the at least one of the re-measurement or the data invalidation, and determining settings to apply to a lot at a process tool based on process variability patterns established by the state-based APC model from the updated values in the state value table and the state update table.
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