发明申请
- 专利标题: HYBRID COMPOSITE WAFER CARRIER FOR WET CLEAN EQUIPMENT
- 专利标题(中): 用于湿巾清洁设备的混合复合波浪载体
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申请号: US11743516申请日: 2007-05-02
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公开(公告)号: US20080152922A1公开(公告)日: 2008-06-26
- 发明人: Wing Lau Cheng , Helen Cheng , Arnold Kholodenko
- 申请人: Wing Lau Cheng , Helen Cheng , Arnold Kholodenko
- 主分类号: B32B27/38
- IPC分类号: B32B27/38
摘要:
A carrier structure for supporting a substrate when being processed by passing the carrier through a meniscus formed by upper and lower proximity heads is described. The carrier includes a frame having an opening sized for receiving a substrate and a plurality of support pins for supporting the substrate within the opening, the opening being slightly larger than the substrate such that a gap exists between the substrate and the opening. The frame comprises a composite core, a top sheet, a bottom sheet, a layer of aramid fabric between the top sheet and the core and a second layer of aramid fabric between the bottom sheet and the core. The top sheet and the bottom sheet being formed from a polymer material. A method of manufacture is also described.
公开/授权文献
- US08146902B2 Hybrid composite wafer carrier for wet clean equipment 公开/授权日:2012-04-03
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