发明申请
US20080164503A1 Ferroelectric Memory Devices Having a Protruding Bottom Electrode and Methods of Forming the Same 审中-公开
具有突起底电极的铁电存储器件及其形成方法

Ferroelectric Memory Devices Having a Protruding Bottom Electrode and Methods of Forming the Same
摘要:
A ferroelectric memory device and methods of forming the same are provided. Forming a ferroelectric device includes forming an insulation layer over a substrate having a conductive region, forming a bottom electrode electrically connected to the conductive region in the insulation layer, recessing the insulation layer, and forming a ferroelectric layer and an upper electrode layer covering the bottom electrode over the recessed insulation layer, The bottom electrode protrudes over an upper surface of the recessed insulation layer.
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