发明申请
- 专利标题: Ferroelectric Memory Devices Having a Protruding Bottom Electrode and Methods of Forming the Same
- 专利标题(中): 具有突起底电极的铁电存储器件及其形成方法
-
申请号: US11970770申请日: 2008-01-08
-
公开(公告)号: US20080164503A1公开(公告)日: 2008-07-10
- 发明人: Suk-Hun Choi , Chang-Ki Hong , Jung-Hyeon Kim , Jun-Young Lee , Jong-Heun Lim , Seong-Kyu Yun
- 申请人: Suk-Hun Choi , Chang-Ki Hong , Jung-Hyeon Kim , Jun-Young Lee , Jong-Heun Lim , Seong-Kyu Yun
- 专利权人: Samsung Electronics Co., Ltd.
- 当前专利权人: Samsung Electronics Co., Ltd.
- 优先权: KR2007-2089 20070108
- 主分类号: G11C11/22
- IPC分类号: G11C11/22 ; H01L29/78 ; H01L21/02
摘要:
A ferroelectric memory device and methods of forming the same are provided. Forming a ferroelectric device includes forming an insulation layer over a substrate having a conductive region, forming a bottom electrode electrically connected to the conductive region in the insulation layer, recessing the insulation layer, and forming a ferroelectric layer and an upper electrode layer covering the bottom electrode over the recessed insulation layer, The bottom electrode protrudes over an upper surface of the recessed insulation layer.
信息查询