- 专利标题： SAPPHIRE SUBSTRATES AND METHODS OF MAKING SAME
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申请号： US11963369申请日： 2007-12-21
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公开(公告)号： US20080164578A1公开(公告)日： 2008-07-10
- 发明人: Brahmanandam V. Tanikella , Matthew A. Simpson , Palaniappan Chinnakaruppan , Robert A. Rizzuto , Isaac K. Cherian , Ramanujam Vedantham
- 申请人： Brahmanandam V. Tanikella , Matthew A. Simpson , Palaniappan Chinnakaruppan , Robert A. Rizzuto , Isaac K. Cherian , Ramanujam Vedantham
- 申请人地址： US MA Worcester
- 专利权人： SAINT-GOBAIN CERAMICS & PLASTICS, INC.
- 当前专利权人： SAINT-GOBAIN CERAMICS & PLASTICS, INC.
- 当前专利权人地址： US MA Worcester
- 主分类号： H01L31/036
- IPC分类号： H01L31/036
摘要：
A sapphire substrate includes a generally planar surface having a crystallographic orientation selected from the group consisting of a-plane, r-plane, m-plane, and c-plane orientations, and having a nTTV of not greater than about 0.037 μm/cm2, wherein nTTV is total thickness variation normalized for surface area of the generally planar surface, the substrate having a diameter not less than about 9.0 cm.
公开/授权文献
- US07956356B2 Sapphire substrates and methods of making same 公开/授权日：2011-06-07
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