Invention Application
- Patent Title: POROUS SILICON AND METHOD OF PREPARING THE SAME
- Patent Title (中): 多孔硅及其制备方法
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Application No.: US11967138Application Date: 2007-12-29
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Publication No.: US20080166538A1Publication Date: 2008-07-10
- Inventor: Sang Woo LIM , Young Hwan Lee
- Applicant: Sang Woo LIM , Young Hwan Lee
- Applicant Address: KR Seoul
- Assignee: Industry-Academic Cooperation Foundation, Yonsei University of Yonsei University
- Current Assignee: Industry-Academic Cooperation Foundation, Yonsei University of Yonsei University
- Current Assignee Address: KR Seoul
- Priority: KR10-2007-0002121 20070108
- Main IPC: B32B3/26
- IPC: B32B3/26 ; C25D9/06

Abstract:
The present invention relates to a vertical-alignment type porous silicon including a first pore 11 which is formed in an upper side of the silicon, a second pore 12 which is formed in a lower side of the first pore 11 and has a diameter that is larger or smaller than a diameter of the first pore 11, a third pore 13 which is formed in a lower side of the second pore 12 and has a diameter that is identical or similar to the diameter of the first pore 11, and one or more pore parts 11, 12, and 13 which includes the first pore 11, the second pore 12, and the third pore 13. A pore part having a double structure is formed in a silicon. Thus, the silicon having an improved surface area can be obtained as compared to a known porous silicon, and since different electronic materials can be implanted into different pores, it is easy to form interfaces of the implanted electronic materials.
Public/Granted literature
- US07972687B2 Porous silicon and method of preparing the same Public/Granted day:2011-07-05
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