发明申请
- 专利标题: ROTATIONAL MEMS DEVICE HAVING PIEZO-RESISTOR SENSOR
- 专利标题(中): 具有PIEZO电阻传感器的旋转MEMS器件
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申请号: US11858183申请日: 2007-09-20
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公开(公告)号: US20080168670A1公开(公告)日: 2008-07-17
- 发明人: Young-chul Ko , Jin-woo Cho , U-hyuk Choi , Seong-ho Shin
- 申请人: Young-chul Ko , Jin-woo Cho , U-hyuk Choi , Seong-ho Shin
- 申请人地址: KR Suwon-si
- 专利权人: Samsung Electro-mechanics Co., Ltd.
- 当前专利权人: Samsung Electro-mechanics Co., Ltd.
- 当前专利权人地址: KR Suwon-si
- 优先权: KR10-2007-0004415 20070115
- 主分类号: G01B7/30
- IPC分类号: G01B7/30
摘要:
A rotational micro-electromechanical system (MEMS) having a piezo-resistor sensor is provided. The rotational MEMS device includes a pair of torsion springs that support a stage, four resistors, at least one of the resistors being formed along a center axis of the torsion springs, and electrical signal cables connected to the four resistors, wherein at least one of the torsion springs is formed in a direction on an n-type silicon substrate having a (100) plane, and the resistors formed on the at least one of the torsion springs are formed in a group direction.
公开/授权文献
- US07642576B2 Rotational MEMS device having piezo-resistor sensor 公开/授权日:2010-01-05
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