发明申请
- 专利标题: METHODS OF FABRICATING CMOS IMAGE SENSORS
- 专利标题(中): 制作CMOS图像传感器的方法
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申请号: US11950249申请日: 2007-12-04
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公开(公告)号: US20080182354A1公开(公告)日: 2008-07-31
- 发明人: Jong-Jin Lee , Ju-Hyun Ko , Jong-Eun Park , Hyun-Suk Kim , Dong-Yoon Jang
- 申请人: Jong-Jin Lee , Ju-Hyun Ko , Jong-Eun Park , Hyun-Suk Kim , Dong-Yoon Jang
- 专利权人: Samsung Electronics Co., Ltd.
- 当前专利权人: Samsung Electronics Co., Ltd.
- 优先权: KR10-2007-0010063 20070131
- 主分类号: H01L31/18
- IPC分类号: H01L31/18
摘要:
CMOS image sensors and related methods of fabricating CMOS image sensors are disclosed. Fabrication of a CMOS image sensor can include forming a first impurity region having a first conductivity type in a semiconductor substrate. A second impurity region having a second conductivity type is formed in the semiconductor substrate adjacent to the first impurity region. A third impurity region having the first conductivity type is formed in the semiconductor substrate and located below the second impurity region. A transfer gate is formed on the semiconductor substrate and at least partially overlaps the first, second, and third impurity regions. A photo sensitive device is formed in the semiconductor substrate and adjacent to one side of the transfer gate. A floating diffusion region is formed in the semiconductor substrate and located adjacent to an opposite side of the transfer gate from the photosensitive device.
公开/授权文献
- US2645600A Process for dewaxing oils containing wax 公开/授权日:1953-07-14
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