发明申请
- 专利标题: COMPOSITIONS FOR USE IN FORMING A PATTERN AND METHODS OF FORMING A PATTERN
- 专利标题(中): 用于形成图案的组合物和形成图案的方法
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申请号: US12025823申请日: 2008-02-05
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公开(公告)号: US20080193877A1公开(公告)日: 2008-08-14
- 发明人: Ju-Young Kim , Joon-Seok Oh , Jae-Hyun Kim
- 申请人: Ju-Young Kim , Joon-Seok Oh , Jae-Hyun Kim
- 申请人地址: KR Suwon-si
- 专利权人: SAMSUNG ELECTRONICS CO., LTD.
- 当前专利权人: SAMSUNG ELECTRONICS CO., LTD.
- 当前专利权人地址: KR Suwon-si
- 优先权: KR10-2007-0013259 20070208
- 主分类号: G03F7/004
- IPC分类号: G03F7/004 ; G03F7/30
摘要:
In a composition for forming an interfacial layer on a photoresist pattern, and a method of forming a pattern using the composition, the composition includes a water-soluble polymer, a cross-linking agent and a water-miscible solvent. The water-soluble polymer includes a repeating unit represented by Formula 1, wherein R1, R2, R3, R4 and R5 independently denote a hydrogen atom, a hydroxyl group, an alkyl group, a hydroxyalkyl group, an aminoalkyl group, a mercaptoalkyl group, an amino group, a mercapto group or an ammonium salt, R6 denotes a hydrogen atom or an alkyl group, m denotes an integer of 1 to 4 both inclusive, and x denotes an integer of 1 to 1,000 both inclusive. Also, at least one of R1, R2, R3, R4 and R5 is a hydroxyl group, a hydroxyalkyl group, an aminoalkyl group, a mercaptoalkyl group, an amino group, a mercapto group or an ammonium salt.
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