发明申请
- 专利标题: Scanning Transmission Charged Particle Beam Device
- 专利标题(中): 扫描传输带电粒子束装置
-
申请号: US12031754申请日: 2008-02-15
-
公开(公告)号: US20080197282A1公开(公告)日: 2008-08-21
- 发明人: Yoshihiko Nakayama , Isao Nagaoki , Ryoichi Ishii
- 申请人: Yoshihiko Nakayama , Isao Nagaoki , Ryoichi Ishii
- 申请人地址: JP Minato-ku
- 专利权人: Hitachi High-Technologies Corporation
- 当前专利权人: Hitachi High-Technologies Corporation
- 当前专利权人地址: JP Minato-ku
- 优先权: JP2007-036399 20070216
- 主分类号: G01N23/00
- IPC分类号: G01N23/00
摘要:
There is provided a scanning transmission charged particle beam device by which charged particles of a bright-field image and charged particles of a dark-field image may be clearly separated, and bright-field images and dark-field images with high accuracy may be obtained even in a state in which the scanning range of a charged particle beams on a sample is changed.A deflecting coil is provided below a sample, and a charged particle detector for a dark-field image with an opening is provided below the deflecting coil. A charged particle detector for a bright-field image is provided below the above opening. By the deflecting coil below the sample, a charged particle beam for a bright-field image is configured to be synchronized with the scanning of a particle beam, and to be deflected in an opposite direction to the deflected direction of the particle beam. Thereby, a charged particles beam of a bright-field image passes through the opening of the charged particle detector for a dark-field image, and is detected by the charged particle detector for a bright-field image.
信息查询