发明申请
US20080198455A1 Optical System, In Particular Objective Or Illumination System For A Microlithographic Projection Exposure Apparatus
审中-公开
光学系统,特别是用于微光刻投影曝光装置的目标或照明系统
- 专利标题: Optical System, In Particular Objective Or Illumination System For A Microlithographic Projection Exposure Apparatus
- 专利标题(中): 光学系统,特别是用于微光刻投影曝光装置的目标或照明系统
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申请号: US11813902申请日: 2006-02-22
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公开(公告)号: US20080198455A1公开(公告)日: 2008-08-21
- 发明人: Michael Totzeck , Daniel Kraehmer , Toralf Gruner
- 申请人: Michael Totzeck , Daniel Kraehmer , Toralf Gruner
- 申请人地址: DE Oberkochen
- 专利权人: CARL ZEISS SMT AG
- 当前专利权人: CARL ZEISS SMT AG
- 当前专利权人地址: DE Oberkochen
- 国际申请: PCT/EP2006/060196 WO 20060222
- 主分类号: G02B27/18
- IPC分类号: G02B27/18 ; G02B27/28 ; G02B1/08
摘要:
The invention relates to an optical system, in particular an objective or an illumination system for a microlithographic projection exposure apparatus, which in particular also permits the use of crystal materials with a high refractive index while reducing the influence of intrinsic birefringence on the imaging properties. In particular the invention relates to an optical system having at least two lens groups (10-60) with lenses of intrinsically birefringent material, wherein the lens groups (10-60) respectively comprise a first subgroup with lenses in a (100)-orientation and a second subgroup with lenses in (111)-orientation, and wherein the lenses of each subgroup are arranged rotated relative to each other about their lens axes.
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