发明申请
US20080213536A1 Silicon Carbide Single Crystal Wafer and Method for Manufacturing the Same 有权
碳化硅单晶硅片及其制造方法

Silicon Carbide Single Crystal Wafer and Method for Manufacturing the Same
摘要:
The invention provides a method for manufacturing the silicon carbide single crystal wafer capable of improving the utilization ratio of the bulk silicon carbide single crystal, capable of improving characteristics of the element and capable of improving cleavability, and the silicon carbide single crystal wafer obtained by the manufacturing method. An α(hexagonal)-silicon carbide single crystal wafer which has a flat homoepitaxial growth surface with a surface roughness of 2 nm or less and which has an off-angle from the (0001)c plane of 0.4° or less.
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