发明申请
- 专利标题: Silicon Carbide Single Crystal Wafer and Method for Manufacturing the Same
- 专利标题(中): 碳化硅单晶硅片及其制造方法
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申请号: US11661195申请日: 2005-08-24
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公开(公告)号: US20080213536A1公开(公告)日: 2008-09-04
- 发明人: Takayuki Maruyama , Toshimi Chiba
- 申请人: Takayuki Maruyama , Toshimi Chiba
- 申请人地址: JP Tokyo
- 专利权人: BRIDGESTONE CORPORATION
- 当前专利权人: BRIDGESTONE CORPORATION
- 当前专利权人地址: JP Tokyo
- 优先权: JP2004-243913 20040824; JP2004-338063 20041122
- 国际申请: PCT/JP2005/015324 WO 20050824
- 主分类号: B32B3/00
- IPC分类号: B32B3/00 ; H01L21/36
摘要:
The invention provides a method for manufacturing the silicon carbide single crystal wafer capable of improving the utilization ratio of the bulk silicon carbide single crystal, capable of improving characteristics of the element and capable of improving cleavability, and the silicon carbide single crystal wafer obtained by the manufacturing method. An α(hexagonal)-silicon carbide single crystal wafer which has a flat homoepitaxial growth surface with a surface roughness of 2 nm or less and which has an off-angle from the (0001)c plane of 0.4° or less.
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