发明申请
US20080218028A1 Piezoceramic Multilayer Actuator and Method of Manufacturing a Piezoceramic Multilayer Actuator
有权
压电陶瓷多层致动器和制造压电陶瓷多层致动器的方法
- 专利标题: Piezoceramic Multilayer Actuator and Method of Manufacturing a Piezoceramic Multilayer Actuator
- 专利标题(中): 压电陶瓷多层致动器和制造压电陶瓷多层致动器的方法
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申请号: US12031385申请日: 2008-02-14
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公开(公告)号: US20080218028A1公开(公告)日: 2008-09-11
- 发明人: Bernhard Dollgast , Masahiro Inagaki , Harald Johannes Kastl , Atsushi Ochi , Takami Sakamoto , Carsten Schuh
- 申请人: Bernhard Dollgast , Masahiro Inagaki , Harald Johannes Kastl , Atsushi Ochi , Takami Sakamoto , Carsten Schuh
- 申请人地址: DE Munchen
- 专利权人: Siemens Aktiengesellschaft
- 当前专利权人: Siemens Aktiengesellschaft
- 当前专利权人地址: DE Munchen
- 优先权: EP07003447 20070219
- 主分类号: H01L41/083
- IPC分类号: H01L41/083 ; H01L41/187 ; H01L41/24
摘要:
In a method of manufacturing a piezoceramic multilayer actuator (10), a plurality of green layers is provided, wherein the green layers are to be converted to piezoceramic layers (12) with a piezoceramic material in a subsequent step of heating. A security layer material mixture with a second material (32) and particles (30) embedded in the second material (32) is provided, wherein the particles (30) have a third material different from the first material and different from the second material (32). The security layer material mixture is laminated between two piezoceramic layers (12), thereby forming a green stack. The green stack is heated to a sintering temperature, wherein the green layers are converted to the piezoceramic layers (12), and wherein a chemical reaction of the third material degrades the mechanical connection of the piezoceramic layers (12) by the security layer (20).
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