发明申请
- 专利标题： Control methods for micromirror devices implemented with a single address electrode
- 专利标题（中）： 用单个地址电极实现的微镜器件的控制方法
-
申请号： US12072452申请日： 2008-02-25
-
公开(公告)号： US20080218831A1公开(公告)日： 2008-09-11
- 发明人: Yoshihiro Maeda , Fusao Ishii , Hirokazu Nishino , Kazuma Arai
- 申请人： Yoshihiro Maeda , Fusao Ishii , Hirokazu Nishino , Kazuma Arai
- 主分类号： G02B26/08
- IPC分类号： G02B26/08
摘要：
A method for controlling a micromirror device including mirror elements each composed of a micromirror supported on a substrate by an elastic hinge, and a address electrode arranged across the deflection axis of the micromirror comprises deflecting the micromirror by changing a potential to a predetermined waveform for the address electrode.