发明申请
- 专利标题： Flooding Chamber For Coating Installations
- 专利标题（中）： 喷涂室涂装设备
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申请号： US11769807申请日： 2007-06-28
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公开(公告)号： US20080223294A1公开(公告)日： 2008-09-18
- 发明人: Thomas Gebele , Andreas Lopp , Oliver Heimel
- 申请人： Thomas Gebele , Andreas Lopp , Oliver Heimel
- 申请人地址： US CA Santa Clara
- 专利权人： Applied Materials, Inc.
- 当前专利权人： Applied Materials, Inc.
- 当前专利权人地址： US CA Santa Clara
- 主分类号： B05C3/02
- IPC分类号： B05C3/02
摘要：
The invention relates to a flooding chamber for coating installations, with which shorter flooding times, and therewith shorter clock cycles, can be attained. Two flooding means are therein utilized, between which a substrate is disposed symmetrically. The flooding means direct a gas jet directly onto the substrate. Hereby the substrate is fixed between the flooding means.