发明申请
US20080227265A1 Methods for Fabricating Semiconductor Devices 审中-公开
制造半导体器件的方法

  • 专利标题: Methods for Fabricating Semiconductor Devices
  • 专利标题(中): 制造半导体器件的方法
  • 申请号: US12131016
    申请日: 2008-05-30
  • 公开(公告)号: US20080227265A1
    公开(公告)日: 2008-09-18
  • 发明人: HAK DONG KIM
  • 申请人: HAK DONG KIM
  • 优先权: KR10-2003-0064913 20030918; KR10-2003-0064914 20030918; KR10-2003-0064915 20030918
  • 主分类号: H01L21/30
  • IPC分类号: H01L21/30
Methods for Fabricating Semiconductor Devices
摘要:
Methods of fabricating a gate-insulating layer of a dual-gate semiconductor device are disclosed. A disclosed method comprises sequentially forming a buffer oxide layer and a nitride layer on a semiconductor substrate having at least one high voltage device area and at least one low voltage device area; forming at least one trench by selectively removing at least one portion of the buffer oxide layer, the nitride layer and the semiconductor substrate; forming at least one device isolation layer by depositing an oxide layer in the trench and planarizing the oxide layer; removing the nitride layer and the buffer oxide layer remaining on the high voltage device area; forming a first gate-insulating layer on the high voltage device area; removing the nitride layer and the buffer oxide layer remaining on the low voltage device area; and forming a second gate-insulating layer on the low voltage device area.
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