发明申请
- 专利标题: APPARATUS, METHOD AND PROGRAM FOR MEASURING SURFACE TEXTURE
- 专利标题(中): 用于测量表面纹理的装置,方法和程序
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申请号: US12055547申请日: 2008-03-26
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公开(公告)号: US20080236260A1公开(公告)日: 2008-10-02
- 发明人: Takashi Noda , Hiromi Deguchi , Naoya Kikuchi
- 申请人: Takashi Noda , Hiromi Deguchi , Naoya Kikuchi
- 申请人地址: JP Kawasaki-shi
- 专利权人: MITUTOYO CORPORATION
- 当前专利权人: MITUTOYO CORPORATION
- 当前专利权人地址: JP Kawasaki-shi
- 优先权: JP2007-081396 20070327
- 主分类号: G01B5/28
- IPC分类号: G01B5/28
摘要:
An apparatus for measuring surface texture causes a probe to trace a surface of a workpiece to detect contact between a tip provided on the tip of the probe and the surface of the workpiece and measures surface texture of the workpiece. The apparatus for measuring surface texture includes: a path division unit dividing a path along which the tip is moved into a plurality of sections between the starting point and the ending point of the path; a moving velocity calculation unit calculating a moving velocity of the tip in sequence from the starting point to the ending point for each of the plurality of sections, based on the path information for each of the plurality of sections; and a stylus movement control unit moving the tip in a section for which a moving velocity has been calculated at the moving velocity calculation unit.
公开/授权文献
- US07643963B2 Apparatus, method and program for measuring surface texture 公开/授权日:2010-01-05
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