发明申请
- 专利标题: Scanning electron microscope
- 专利标题(中): 扫描电子显微镜
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申请号: US12073948申请日: 2008-03-12
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公开(公告)号: US20080237465A1公开(公告)日: 2008-10-02
- 发明人: Michio Hatano , Takashi Ohshima , Mitsugu Sato
- 申请人: Michio Hatano , Takashi Ohshima , Mitsugu Sato
- 专利权人: Hitachi High-Technologies Corporation
- 当前专利权人: Hitachi High-Technologies Corporation
- 优先权: JP2007-080166 20070326
- 主分类号: G01N23/02
- IPC分类号: G01N23/02
摘要:
A scanning electron microscope can discriminate secondary particles in a desired energy region by band-pass and detect the secondary particles with a high yield point. Even when a lens 23 is disposed on an electron source side of an objective lens 18, and a primary electron beam forms any optical system on the electron gun side of the lens, the lens operates the primary electron beam to be converged to a convergent point 24 that is a specific position. A detection ExB 16 that supplies a field that affects the locus of the secondary particles that are generated from a specimen 2 is disposed at the convergent point 24 of the primary electron beam so as to lead only the secondary particles in a specific energy range to a detection unit 13. Because a position to which the field that affects the locus of the secondary particles is supplied is the convergent point of the primary electron beam 19, it is possible to lead only the secondary particles of the desired energy to the detection unit without enlarging the aberration of the primary electron beam 19 and also to effectively conduct the band-pass discrimination of the energy. As a result, the signal electrons according to an observation object can be discriminated and detected.
公开/授权文献
- US08217363B2 Scanning electron microscope 公开/授权日:2012-07-10
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