发明申请
US20080237745A1 SRAM CELL WITH ASYMMETRICAL TRANSISTORS FOR REDUCED LEAKAGE
审中-公开
具有不对称晶体管的SRAM单元,用于减少漏电
- 专利标题: SRAM CELL WITH ASYMMETRICAL TRANSISTORS FOR REDUCED LEAKAGE
- 专利标题(中): 具有不对称晶体管的SRAM单元,用于减少漏电
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申请号: US12113770申请日: 2008-05-01
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公开(公告)号: US20080237745A1公开(公告)日: 2008-10-02
- 发明人: Shyh-Horng YANG , Kayvan SADRA , Theodore W. Houston
- 申请人: Shyh-Horng YANG , Kayvan SADRA , Theodore W. Houston
- 申请人地址: US TX Dallas
- 专利权人: Texas Instruments Incorporated
- 当前专利权人: Texas Instruments Incorporated
- 当前专利权人地址: US TX Dallas
- 主分类号: H01L27/11
- IPC分类号: H01L27/11
摘要:
A method of fabricating an SRAM cell with reduced leakage is disclosed. The method comprises fabricating asymmetrical transistors in the SRAM cell. The transistors are asymmetrical in a manner that reduces the drain leakage current of the transistors. The fabrication of asymmetrical pass transistors comprises forming a dielectric region on a surface of a substrate having a first conductivity type. A gate region having a length and a width is formed on the dielectric region. Source and drain extension regions having a second conductivity type are formed in the substrate on opposite sides of the gate region. A first pocket impurity region having a first concentration and the first conductivity type is formed adjacent the source. A second pocket impurity region having a second concentration and the first conductivity type may be formed adjacent the drain. If formed, the second concentration is smaller than the first concentration, reducing the gate induced drain leakage current.
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