发明申请
US20080245154A1 Pressure Sensor 有权
压力传感器

  • 专利标题: Pressure Sensor
  • 专利标题(中): 压力传感器
  • 申请号: US11630015
    申请日: 2005-06-13
  • 公开(公告)号: US20080245154A1
    公开(公告)日: 2008-10-09
  • 发明人: Masashi SekineHidefumi Harada
  • 申请人: Masashi SekineHidefumi Harada
  • 优先权: JP2004-180267 20040617
  • 国际申请: PCT/JP05/10799 WO 20050613
  • 主分类号: G01L9/12
  • IPC分类号: G01L9/12
Pressure Sensor
摘要:
There is provided a pressure sensor having: a sensor chip (30) which detects a pressure; a base plate (20 (21, 22)) which supports the sensor chip (30); and a support diaphragm (50) which is bonded to the base plate (20 (21, 22)) and supports the base plate (20 (21, 22)), wherein the pressure sensor (1) has a structure in which the support diaphragm (50) is joined to a package (10), and the sensor chip (30) and the base plate (20 (21, 22)) are supported in the package through the support diaphragm (50) alone, thereby constantly and accurately detecting a pressure without being affected by a heat stress caused due to heat from the outside.
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