发明申请
- 专利标题: Pressure Sensor
- 专利标题(中): 压力传感器
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申请号: US11630015申请日: 2005-06-13
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公开(公告)号: US20080245154A1公开(公告)日: 2008-10-09
- 发明人: Masashi Sekine , Hidefumi Harada
- 申请人: Masashi Sekine , Hidefumi Harada
- 优先权: JP2004-180267 20040617
- 国际申请: PCT/JP05/10799 WO 20050613
- 主分类号: G01L9/12
- IPC分类号: G01L9/12
摘要:
There is provided a pressure sensor having: a sensor chip (30) which detects a pressure; a base plate (20 (21, 22)) which supports the sensor chip (30); and a support diaphragm (50) which is bonded to the base plate (20 (21, 22)) and supports the base plate (20 (21, 22)), wherein the pressure sensor (1) has a structure in which the support diaphragm (50) is joined to a package (10), and the sensor chip (30) and the base plate (20 (21, 22)) are supported in the package through the support diaphragm (50) alone, thereby constantly and accurately detecting a pressure without being affected by a heat stress caused due to heat from the outside.
公开/授权文献
- US07703329B2 Pressure sensor 公开/授权日:2010-04-27