发明申请
- 专利标题: Evanescent Mode Resonator Including Tunable Capacitive Post
- 专利标题(中): 包含可调谐电容信号的衰减模式谐振器
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申请号: US11735269申请日: 2007-04-13
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公开(公告)号: US20080252401A1公开(公告)日: 2008-10-16
- 发明人: Alexandros Margomenos , Linda P.B. Katehi
- 申请人: Alexandros Margomenos , Linda P.B. Katehi
- 申请人地址: US MI Ann Arbor
- 专利权人: EMAG Technologies, Inc.
- 当前专利权人: EMAG Technologies, Inc.
- 当前专利权人地址: US MI Ann Arbor
- 主分类号: H01P1/219
- IPC分类号: H01P1/219
摘要:
An evanescent mode resonator including a cavity formed in a substrate of semiconductor material. The resonator includes a capacitive post positioned within the cavity, and a tuning element positioned within the wall of the cavity proximate to the capacitive post, where a gap between the flexible element and the post sets the tuning of the resonator.
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