发明申请
US20080252401A1 Evanescent Mode Resonator Including Tunable Capacitive Post 审中-公开
包含可调谐电容信号的衰减模式谐振器

Evanescent Mode Resonator Including Tunable Capacitive Post
摘要:
An evanescent mode resonator including a cavity formed in a substrate of semiconductor material. The resonator includes a capacitive post positioned within the cavity, and a tuning element positioned within the wall of the cavity proximate to the capacitive post, where a gap between the flexible element and the post sets the tuning of the resonator.
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