发明申请
- 专利标题: CHARGED PARTICLE BEAM APPARATUS AND METHOD FOR OPERATING A CHARGED PARTICLE BEAM APPARATUS
- 专利标题(中): 充电颗粒光束装置和操作充电颗粒光束装置的方法
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申请号: US11923407申请日: 2007-10-24
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公开(公告)号: US20080258060A1公开(公告)日: 2008-10-23
- 发明人: JUERGEN FROSIEN , Helmut Banzhof , Jacob Levin , Dror Shemesh
- 申请人: JUERGEN FROSIEN , Helmut Banzhof , Jacob Levin , Dror Shemesh
- 优先权: EP06022329.4 20061025
- 主分类号: G01N23/00
- IPC分类号: G01N23/00
摘要:
A charged particle beam apparatus is provided, which comprises a charged particle beam column for generating a primary charged particle beam; a focusing assembly, such as a charged particle lens, e.g., an electrostatic lens, for focusing the primary charged particle beam on a specimen; a detector for detecting charged signal particles which are emerging from the specimen; and a deflector arrangement for deflecting the primary charged particle beam. The deflector arrangement is arranged downstream of the focusing assembly and is adapted for allowing the charged signal particles passing therethrough. The detector is laterally displaced with respect to the optical axis in a deflection direction defined by the post-focusing deflector arrangement.