发明申请
- 专利标题： Integrated quartz oscillator on an active electronic susbtrate
- 专利标题（中）： 集成的石英振荡器在一个有源电子信号
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申请号： US11881461申请日： 2007-07-27
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公开(公告)号： US20080258829A1公开(公告)日： 2008-10-23
- 发明人: Randall L. Kubena , David T. Chang
- 申请人： Randall L. Kubena , David T. Chang
- 专利权人： HRL Laboratories, LLC
- 当前专利权人： HRL Laboratories, LLC
- 主分类号： H03B5/36
- IPC分类号： H03B5/36 ; H01L41/22
摘要：
An oscillator having a quartz resonator, and a base wafer containing active electronics, wherein the quartz resonator is bonded directly to the base wafer and subsequently hermetically capped.