发明申请
- 专利标题: Method of forming a thin film pattern and method of fabricating a liquid crystal display device
- 专利标题(中): 形成薄膜图案的方法和制造液晶显示装置的方法
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申请号: US12003770申请日: 2007-12-31
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公开(公告)号: US20080264902A1公开(公告)日: 2008-10-30
- 发明人: In-Duk Song , Seong Pil Cho
- 申请人: In-Duk Song , Seong Pil Cho
- 申请人地址: KR Seoul
- 专利权人: LG ELECTRONICS INC.
- 当前专利权人: LG ELECTRONICS INC.
- 当前专利权人地址: KR Seoul
- 优先权: KR10-2007-0040872 20070426
- 主分类号: C23F1/02
- IPC分类号: C23F1/02 ; B32B38/14
摘要:
A method of forming a thin film pattern includes: providing a printing roller and a substrate including a thin film; coating the printing roller with an etch-resist solution including a base polymer, a carrier solvent, a tackifier and a surfactant; removing the carrier solvent from the coated etch-resist solution thereby transitioning the etch-resist solution from liquid phase to solid phase; patterning the solid etch-resist; transferring the patterned etch-resist from the printing roller to the substrate; and patterning the thin film corresponding to the transferred etch-resist.
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