发明申请
US20080267237A1 Monolithically-Pumped Erbium-Doped Waveguide Amplifiers and Lasers
审中-公开
单片泵浦铒掺杂波导放大器和激光器
- 专利标题： Monolithically-Pumped Erbium-Doped Waveguide Amplifiers and Lasers
- 专利标题（中）： 单片泵浦铒掺杂波导放大器和激光器
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申请号： US12105624申请日： 2008-04-18
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公开(公告)号： US20080267237A1公开(公告)日： 2008-10-30
- 发明人: Douglas Hall , Mingjun Huang
- 申请人： Douglas Hall , Mingjun Huang
- 主分类号： H01S5/026
- IPC分类号： H01S5/026 ; H01L33/00
摘要：
Disclosed is a method of doping an oxide. The example method includes forming at least one of an AlGaAs oxide or an InAlP oxide on a GaAs substrate, and incorporating Erbium into the at least one AlGaAs oxide or InAlP oxide via ion implantation to form an Erbium-doped oxide layer. The example method also includes annealing the substrate and the at least one AlGaAs oxide or InAlP oxide.
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