发明申请
US20080268353A1 STENCIL MASK HAVING MAIN AND AUXILIARY STRUT AND METHOD OF FORMING THE SAME
失效
具有主要和辅助条纹的横断面及其形成方法
- 专利标题: STENCIL MASK HAVING MAIN AND AUXILIARY STRUT AND METHOD OF FORMING THE SAME
- 专利标题(中): 具有主要和辅助条纹的横断面及其形成方法
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申请号: US12114946申请日: 2008-05-05
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公开(公告)号: US20080268353A1公开(公告)日: 2008-10-30
- 发明人: In-Sung KIM , Ho-Chul Kim
- 申请人: In-Sung KIM , Ho-Chul Kim
- 优先权: KR2003-42775 20030627
- 主分类号: G03F1/00
- IPC分类号: G03F1/00
摘要:
A stencil mask includes a membrane forming thin layer having membrane areas and a border area that limits the membrane areas. The membrane areas have a plurality of pattern areas which include an aperture through which particle beams can permeate and non-pattern areas interposed between the pattern areas. A main strut supports the membrane areas and is formed on the border area of the membrane forming thin layer. An auxiliary strut is formed in the non-pattern areas inside the membrane pattern area such that the auxiliary strut divides the membrane areas into plural divided membrane areas. The auxiliary strut supports the divided membrane areas.