发明申请
- 专利标题: APPARATUS FOR FORMING A THIN FILM USING AN INKJET PRINTING METHOD
- 专利标题(中): 使用喷墨打印方法形成薄膜的装置
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申请号: US12176865申请日: 2008-07-21
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公开(公告)号: US20080273072A1公开(公告)日: 2008-11-06
- 发明人: Jin-Koo CHUNG , Joon-Hoo CHOI , Dong-Won LEE
- 申请人: Jin-Koo CHUNG , Joon-Hoo CHOI , Dong-Won LEE
- 优先权: KR2003-81123 20031117
- 主分类号: B41J2/01
- IPC分类号: B41J2/01
摘要:
In an apparatus of forming a thin film, the apparatus has a printing chamber that forms a thin film on a substrate. The apparatus has at least two drying chambers that receive the substrate on which the thin film is formed and dry the thin film on the substrate. The two drying chambers may be independently controlled. Accordingly, the apparatus may reduce process time for forming the thin film without contamination of the substrate.
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