发明申请
- 专利标题: PROJECTION OBJECTIVE ADAPTED FOR USE WITH DIFFERENT IMMERSION FLUIDS OR LIQUIDS, METHOD OF CONVERSION OF SUCH AND PRODUCTION METHOD
- 专利标题(中): 投影目标适用于不同浸入液或液体的方法,转换方法和生产方法
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申请号: US11420103申请日: 2006-05-24
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公开(公告)号: US20080273248A1公开(公告)日: 2008-11-06
- 发明人: Susanne Beder , Wilhelm Ulrich , Heiko Feldmann , Wolfgang Singer , Toralf Gruner
- 申请人: Susanne Beder , Wilhelm Ulrich , Heiko Feldmann , Wolfgang Singer , Toralf Gruner
- 申请人地址: DE Oberkochen
- 专利权人: Carl Zeiss SMT AG
- 当前专利权人: Carl Zeiss SMT AG
- 当前专利权人地址: DE Oberkochen
- 主分类号: G02B3/12
- IPC分类号: G02B3/12
摘要:
The invention relates to a projection objective (6), in particular for applications in microlithography, serving to project an image of an object (3) arranged in an object plane (4) onto a substrate (18) arranged in an image plane (7). The projection objective (6) has an object-side-oriented part (10) which is arranged adjacent to the object plane (4) and includes a plurality of optical elements, and it also has an image-side-oriented part (11) of the objective which is arranged adjacent to the image plane (7) and includes a free space (16) serving to receive a fluid (13) and further includes at least a part of an optical end-position element (14) serving to delimit the free space (16) towards the object side. The projection objective (6) is operable in different modes of operation in which the free space (16) is filled with fluids (13) that differ in their respective indices of refraction.
公开/授权文献
信息查询
IPC分类:
G | 物理 |
G02 | 光学 |
G02B | 光学元件、系统或仪器 |
G02B3/00 | 简单或复合透镜 |
G02B3/12 | .充入液体或抽空的透镜 |