发明申请
US20080277646A1 Vertical Type Nanotube Semiconductor Device 审中-公开
立式纳米管半导体器件

Vertical Type Nanotube Semiconductor Device
摘要:
A vertical type nanotuhe semiconductor device including a nanotube bit line, disposed on a substrate and in parallel with the substrate and composed of a nanotube with a conductive property, and a nanotube pole connected to the bit line vertically to the substrate and provides a channel through which carriers migrate. By manufacturing the semiconductor device using the bit line composed of the nanotube, cutoff of an electrical connection of the bit line is prevented and an integration density of the semiconductor device can be improved.
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