发明申请
US20080278867A1 MAGNETORESISTANCE DEVICE WITH A DIFFUSION BARRIER BETWEEN A CONDUCTOR AND A MAGNETORESISTANCE ELEMENT AND METHOD OF FABRICATING THE SAME 有权
具有导体和磁阻元件之间的扩散障碍物的磁阻器件及其制造方法

  • 专利标题: MAGNETORESISTANCE DEVICE WITH A DIFFUSION BARRIER BETWEEN A CONDUCTOR AND A MAGNETORESISTANCE ELEMENT AND METHOD OF FABRICATING THE SAME
  • 专利标题(中): 具有导体和磁阻元件之间的扩散障碍物的磁阻器件及其制造方法
  • 申请号: US12138158
    申请日: 2008-06-12
  • 公开(公告)号: US20080278867A1
    公开(公告)日: 2008-11-13
  • 发明人: Yoshiyuki FUKUMOTOKen-ichi SHIMURAAtsushi KAMIJO
  • 申请人: Yoshiyuki FUKUMOTOKen-ichi SHIMURAAtsushi KAMIJO
  • 申请人地址: JP Tokyo
  • 专利权人: NEC CORPORATION
  • 当前专利权人: NEC CORPORATION
  • 当前专利权人地址: JP Tokyo
  • 优先权: JP319928/2002 20021101
  • 主分类号: G11B5/33
  • IPC分类号: G11B5/33
MAGNETORESISTANCE DEVICE WITH A DIFFUSION BARRIER BETWEEN A CONDUCTOR AND A MAGNETORESISTANCE ELEMENT AND METHOD OF FABRICATING THE SAME
摘要:
A magnetoresistance device is provided for improving thermal stability of a magnetoresistance element by preventing inter-diffusion between a conductor (such as a via and an interconnection) for connecting the magnetoresistance element to another element and layers constituting the magnetoresistance element. A magnetoresistance device is composed of a magnetoresistance element, a non-magnetic conductor providing electrical connection between said magnetoresistance element to another element, and a diffusion barrier structure disposed between said conductor and said magnetoresistance element, the magnetoresistance element including a free ferromagnetic layer having reversible spontaneous magnetization, a fixed ferromagnetic layer having fixed spontaneous magnetization, and a tunnel dielectric layer disposed between said free and fixed ferroelectric layer.
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