发明申请
US20080280104A1 Silicon-carbide nanostructure and method for producing the silicon-carbide nanostructure
审中-公开
碳化硅纳米结构和碳化硅纳米结构的制造方法
- 专利标题: Silicon-carbide nanostructure and method for producing the silicon-carbide nanostructure
- 专利标题(中): 碳化硅纳米结构和碳化硅纳米结构的制造方法
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申请号: US11978559申请日: 2007-10-30
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公开(公告)号: US20080280104A1公开(公告)日: 2008-11-13
- 发明人: Kentaro Komori , Satoshi Yoshida , Kazumi Ogawa
- 申请人: Kentaro Komori , Satoshi Yoshida , Kazumi Ogawa
- 优先权: JP2006-310037 20061116
- 主分类号: B32B5/16
- IPC分类号: B32B5/16 ; H01B1/04
摘要:
A method for producing a silicon-carbide nanostructure, which includes steps of: irradiating a carbon-source supplied to a reaction chamber at a pressure of 1. Pa to 70 Pa with microwaves of 0.5 kW to 3 kW; generating plasma in a space above the silicon substrate at a temperature of 350° C. to 600° C.; and forming a silicon-carbide nanostructure having cone-shaped silicon-carbide aggregates which are scattered on and protruded from a surface of a silicon substrate. The silicon-carbide aggregates have a crystal structure of 2H α-siC.