发明申请
US20080280388A1 CCD type solid-state imaging device and method for manufacturing the same
审中-公开
CCD型固态成像装置及其制造方法
- 专利标题: CCD type solid-state imaging device and method for manufacturing the same
- 专利标题(中): CCD型固态成像装置及其制造方法
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申请号: US12078254申请日: 2008-03-28
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公开(公告)号: US20080280388A1公开(公告)日: 2008-11-13
- 发明人: Kenji Ishida , Masanori Nagase
- 申请人: Kenji Ishida , Masanori Nagase
- 优先权: JPP2006-125054 20060428
- 主分类号: H01L31/18
- IPC分类号: H01L31/18
摘要:
A CCD type solid-state imaging device is provided and includes: photodiodes (PD) in a light receiving area of a semiconductor substrate; vertical charge transfer paths; a horizontal charge transfer path; channel stops including linear high density impurity regions for separating mutually adjoining sets from each other, each set including a PD array and a vertical charge transfer path; a first light-shielding film which is stacked on the light receiving area and has openings in the respective PDs, and also to which a control pulse voltage is applied; a second light-shielding film spaced from the first light-shielding film for covering a connecting portion between the horizontal charge transfer path and light receiving area; and a contact portion of a high density impurity region for connecting the channel stops to the second light-shielding film and also for applying a reference potential to the channel stops.
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