发明申请
- 专利标题: Seal Ring Structure with Improved Cracking Protection
- 专利标题(中): 密封圈结构,提高破裂保护
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申请号: US11842821申请日: 2007-08-21
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公开(公告)号: US20080283969A1公开(公告)日: 2008-11-20
- 发明人: Shin-Puu Jeng , Shih-Hsun Hsu , Shang-Yun Hou , Hao-Yi Tsai , Chen-Hua Yu
- 申请人: Shin-Puu Jeng , Shih-Hsun Hsu , Shang-Yun Hou , Hao-Yi Tsai , Chen-Hua Yu
- 主分类号: H01L23/00
- IPC分类号: H01L23/00
摘要:
An integrated circuit structure includes a semiconductor chip comprising a plurality of dielectric layers, wherein the plurality of dielectric layers includes a top dielectric layer; and a first seal ring adjacent edges of the semiconductor chip. The integrated circuit structure further includes a first passivation layer over a top dielectric layer; and a trench extending from a top surface of the first passivation layer into the first passivation layer, wherein the trench substantially forms a ring. Each side of the ring is adjacent to a respective edge of the semiconductor chip. At least one of the plurality of vias has a width greater than about 70 percent of a width of a respective overlying metal line in the plurality of metal lines.
公开/授权文献
- US08125052B2 Seal ring structure with improved cracking protection 公开/授权日:2012-02-28
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